모폴로지 및 성분분석

Mag. 4~1,000,000배/H.V:0.2kV~30kV(0.1KV step/Resolution:SEI3.0mm
BEI:3.5nm(W-Filament기준) /SE/BE Detector(YAG crystal)/Internal size: 230mm Dia.
-75~+50˚ Tilt with WD15mm/WD 3~50mm Motorized